Semiconductor Material Grades
Material Grades used in Semiconductor Manufacturing
What are the Semiconductor Material Grades? Performance requirements vary based on elastomer location in the process. The advantages of using our elastomer materials include decreased cost of ownership, extended tool Preventative Maintenance (PM) cycles, lower process defects, decreased particle origination and maximised device performance.
Below is the table with our recommended material grades (Other grades available):
MATERIAL NO. | MATERIAL NAME | HARDNESS | MIN TEMP | MAX TEMP | MATERIAL GRADE |
| FFKM | 64 Shore A | -20°C (-4°F) | +275°C (+527°F) | Perfluoroelastomer, ultra-pure semicon grade | |
| MBMS1040 | FFKM | 66 Shore A | -15°C (+5°F) | +275°C (+527°F) | Perfluoroelastomer, radical plasma resistant |
| FFKM | 68 Shore A | -15°C (+5°F) | +300°C (+572°F) | Perfluoroelastomer, plasma resistant | |
| MBMS0585 | FFKM | 65 Shore A | -15°C (+5°F) | +275°C (+527°F) | Perfluoroelastomer, high purity semicon grade |
| MBMS0391 | FFKM | 74 Shore A | -15°C (+5°F) | +275°C (+527°F) | Perfluoroelastomer, high purity semicon grade |
| MBMS0021 | FFKM | 78 Shore A | -15°C (+5°F) | +325°C (+617°F) | Perfluoroelastomer, high-temperature grade |
| MBMS0245 | FFKM | 74 Shore A | -15°C (+5°F) | +320°C (+608°F) | Perfluoroelastomer, high-temperature semicon grade |
| MBMS0729 | FFKM | 70 Shore A | -15°C (+5°F) | +260°C (+500°F) | Perfluoroelastomer, chemistry resistant semicon grade |
| MBMS1108 | FFKM | 66 Shore A | -15°C (+5°F) | +310°C (+590°F) | Perfluoroelastomer, high-temperature, plasma resistant grade |
| MBMS0966 | FFKM | 90 Shore A | -15°C (+5°F) | +300°C (+572°F) | Perfluoroelastomer, dissipative grade |
| MBMS0684 | FFKM | 79 Shore A | -15°C (+5°F) | +280°C (+536°F) | High-performance elastomer, plasma resistant |
| FFKM | 70 Shore A | -15°C (+5°F) | +270°C (+518°F) | High-performance elastomer | |
| MBMS0406 | FFKM | 67 Shore A | -15°C (+5°F) | +300°C (+572°F) | High-performance elastomer |
| MBMS1119 | FKM | 74 Shore A | -15°C (+5°F) | +250°C (+482°F) | High-fluorine fluoroelastomer with enhanced thermal & chemical resistance |
| FFKM | 73 Shore A | -15°C (+5°F) | +260°C (+500°F) | High-purity, plasma resistant fluoroelastomer | |
| MBMS0257 | FFKM | 67 Shore A | -20°C (-4°F) | +180°C (+356°F) | Ultra-pure fluoropolymer grade |
| MBMS0825 | FFKM | 70 Shore A | -15°C (+5°F) | +310°C (+590°F) | Perfluoroelastomer, high-temperature grade |
If you require further information regarding our range of Semiconductor Material Grades, products and/or services, please contact a member of the team.
E & OE.