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Semiconductor Material Grades

Material Grades used in Semiconductor Manufacturing

What are the Semiconductor Material Grades? Performance requirements vary based on elastomer location in the process. The advantages of using our elastomer materials include decreased cost of ownership, extended tool Preventative Maintenance (PM) cycles, lower process defects, decreased particle origination and maximised device performance.

Below is the table with our recommended material grades (Other grades available):

MATERIAL NO.

MATERIAL NAME

HARDNESS

MIN TEMP

MAX TEMP

MATERIAL GRADE

FFKM64 Shore A-20°C (-4°F)+275°C (+527°F)Perfluoroelastomer, ultra-pure semicon grade
MBMS1040FFKM66 Shore A-15°C (+5°F)+275°C (+527°F)Perfluoroelastomer, radical plasma resistant
FFKM68 Shore A-15°C (+5°F)+300°C (+572°F)Perfluoroelastomer, plasma resistant
MBMS0585FFKM65 Shore A-15°C (+5°F)+275°C (+527°F)Perfluoroelastomer, high purity semicon grade
MBMS0391FFKM74 Shore A-15°C (+5°F)+275°C (+527°F)Perfluoroelastomer, high purity semicon grade
MBMS0021FFKM78 Shore A-15°C (+5°F)+325°C (+617°F)Perfluoroelastomer, high-temperature grade
MBMS0245FFKM74 Shore A-15°C (+5°F)+320°C (+608°F)Perfluoroelastomer, high-temperature semicon grade
MBMS0729FFKM70 Shore A-15°C (+5°F)+260°C (+500°F)Perfluoroelastomer, chemistry resistant semicon grade
MBMS1108FFKM66 Shore A-15°C (+5°F)+310°C (+590°F)Perfluoroelastomer, high-temperature, plasma resistant grade
MBMS0966FFKM90 Shore A-15°C (+5°F)+300°C (+572°F)Perfluoroelastomer, dissipative grade
MBMS0684FFKM79 Shore A-15°C (+5°F)+280°C (+536°F)High-performance elastomer, plasma resistant
FFKM70 Shore A-15°C (+5°F)+270°C (+518°F)High-performance elastomer
MBMS0406FFKM67 Shore A-15°C (+5°F)+300°C (+572°F)High-performance elastomer
MBMS1119FKM74 Shore A-15°C (+5°F)+250°C (+482°F)High-fluorine fluoroelastomer with enhanced thermal & chemical resistance
FFKM73 Shore A-15°C (+5°F)+260°C (+500°F)High-purity, plasma resistant fluoroelastomer
MBMS0257FFKM67 Shore A-20°C (-4°F)+180°C (+356°F)Ultra-pure fluoropolymer grade
MBMS0825FFKM70 Shore A-15°C (+5°F)+310°C (+590°F)Perfluoroelastomer, high-temperature grade

If you require further information regarding our range of Semiconductor Material Grades, products and/or services, please contact a member of the team.

E & OE.